QUANTITATIVE PHOTOPYROELECTRIC OUT-OF-PHASE SPECTROSCOPY OF AMORPHOUS-SILICON THIN-FILMS DEPOSITED ON CRYSTALLINE SILICON

被引:11
作者
CHRISTOFIDES, C
MANDELIS, A
ENGEL, A
BISSON, M
HARLING, G
机构
[1] UNIV TORONTO,ONTARIO LASER & LIGHTWAVE RES CTR,TORONTO M5S 1A4,ONTARIO,CANADA
[2] MITEL,DIV SEMICOND,BROMONT J0E 1L0,QUEBEC,CANADA
关键词
D O I
10.1139/p91-053
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A photopyroelectric spectrometer with real-time and(or) self-normalization capability was used for both conventional transmission and thermal-wave spectroscopic measurements of amorphous Si thin films, deposited on crystalline Si substrates. Optical-absorption-coefficient spectra were obtained from these measurements and the superior dynamic range of the out-of-phase (quadrature) photopyroelectric signal was established as the preferred measurement method, owing to its zero-background compensation capability. An extension of a photopyroelectric theoretical model was established and successfully tested in the determination of the optical absorption coefficient and the thermal diffusivity of the sample under investigation. Instrumental sensitivity limits of beta-t almost-equal-to 5 x 10(-3) were demonstrated.
引用
收藏
页码:317 / 323
页数:7
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