METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION OF THE NIOBIUM-NITROGEN-CARBON SYSTEM

被引:2
作者
CUKAUSKAS, EJ [1 ]
HOLM, RT [1 ]
BERRY, AD [1 ]
KAPLAN, R [1 ]
GREEN, MLH [1 ]
机构
[1] UNIV OXFORD,OXFORD,ENGLAND
关键词
D O I
10.1109/TMAG.1987.1064824
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:999 / 1002
页数:4
相关论文
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