共 3 条
[1]
NAGAI K, 1984, SIMS, V4, P448
[2]
NAGAI K, 1987, 141ST COMM JAP SOC P
[3]
SECONDARY ION AND SPUTTERED NEUTRAL FORMATION FROM OXYGEN LOADED SI(100)
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1985, 3 (05)
:1946-1954