SECONDARY ION AND SPUTTERED NEUTRAL FORMATION FROM OXYGEN LOADED SI(100)

被引：25

作者：

SANDER, P

KAISER, U

JEDE, R

LIPINSKY, D

GANSCHOW, O

BENNINGHOVEN, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.572949

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1946 / 1954

页数：9

共 20 条

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