NEAR-FIELD MICROSCOPY AND LITHOGRAPHY WITH UNCOATED FIBER TIPS - A COMPARISON

被引：61

作者：

KRAUSCH, G

WEGSCHEIDER, S

KIRSCH, A

BIELEFELDT, H

MEINERS, JC

MLYNEK, J

机构：

[1] Fakultät für Physik, Universität Konstanz, D-78434 Konstanz

来源：

OPTICS COMMUNICATIONS | 1995年 / 119卷 / 3-4期

关键词：

D O I：

10.1016/0030-4018(95)00280-L

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We show that lateral resolution well beyond 100 nm can be obtained in scanning near-field optical microscopy (SNOM) using uncoated glass fiber tips in the internal reflection mode. Exposure of a photosensitive layer through the tip of a tapered optical fiber reveals that the illuminated area underneath the fiber tip is far larger than the best resolution obtained in microscopy. This finding points to the importance of the particular beam path in an internal reflection mode SNOM experiment. Lithographic experiments with metal coated fiber tips show that in this case, the light field emitted by the tip is indeed confined to an area below 100 nm.

引用

页码：283 / 288

页数：6

共 14 条

[1]

Abbe E, 1873, ARCH MIKROSK ANAT, V9, P413, DOI [DOI 10.1007/BF02956173, 10.1007/BF02956173]

[2] NEAR-FIELD OPTICS - MICROSCOPY, SPECTROSCOPY, AND SURFACE MODIFICATION BEYOND THE DIFFRACTION LIMIT [J].