ROOM-TEMPERATURE GROWTH OF AIN THIN-FILMS BY LASER ABLATION

被引：64

作者：

SEKI, K ^{[1
]}

XU, XQ ^{[1
]}

OKABE, H ^{[1
]}

FRYE, JM ^{[1
]}

HALPERN, JB ^{[1
]}

机构：

[1] HOWARD UNIV,MAT SCI RES CTR EXCELLENCE,WASHINGTON,DC 20059

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 18期

关键词：

D O I：

10.1063/1.107040

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Excimer laser ablation of compressed AlN powder has been used to grow thin AlN films at room temperature on a variety of substrates. The films have a band gap of 6.15 eV as measured by UV absorption. Examination with a scanning electron microscope and an optical microscope shows that the films are smooth. The IR spectrum has an absorption characteristic of AlN. Growth rates are extremely rapid, exceeding 70 nm/min.

引用

页码：2234 / 2236

页数：3

共 18 条

[1] FORMATION OF ALUMINUM NITRIDE FILMS ON GAAS(110) AT ROOM-TEMPERATURE BY REACTIVE MOLECULAR-BEAM EPITAXY - X-RAY AND SOFT-X-RAY PHOTOEMISSION SPECTROSCOPY [J].

BAIER, HU ;

MONCH, W .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (02) :586-590

[2] BEAM TARGET INTERACTION DURING GROWTH OF YBA2CU3O7-X BY THE LASER ABLATION TECHNIQUE [J].

COHEN, A ;

ALLENSPACHER, P ;

BRIEGER, MM ;

JEUCK, I ;

OPOWER, H .

APPLIED PHYSICS LETTERS, 1991, 59 (17) :2186-2188

[3] LATTICE VIBRATION SPECTRA OF ALUMINUM NITRIDE [J].

COLLINS, AT ;

LIGHTOWLERS, EC ;

DEAN, PJ .

PHYSICAL REVIEW, 1967, 158 (03) :833-+

[4]

DEHUANG W, 1990, THIN SOLID FILMS, V187, P127

[5] OPTICAL AND ELECTRICAL CHARACTERIZATIONS OF LASER CHEMICAL-VAPOR-DEPOSITED ALUMINUM OXYNITRIDE FILMS [J].

DEMIRYONT, H ;

THOMPSON, LR ;

COLLINS, GJ .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (09) :3235-3240

[6] LASER-INDUCED EXPLOSIVE DESORPTION [J].

FAIN, B ;

LIN, SH .

JOURNAL OF CHEMICAL PHYSICS, 1989, 91 (04) :2726-2734

[7] PREPARATION AND PROPERTIES OF III-V NITRIDE THIN-FILMS [J].

KUBOTA, K ;

KOBAYASHI, Y ;

FUJIMOTO, K .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (07) :2984-2988

[8]

KURAMOTO N, 1984, 36TH P EL COMP C NEW, P424

[9] THIN SUPERCONDUCTING OXIDE-FILMS [J].

LAIBOWITZ, RB ;

KOCH, RH ;

CHAUDHARI, P ;

GAMBINO, RJ .

PHYSICAL REVIEW B, 1987, 35 (16) :8821-8823

[10] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF AIN FILMS [J].

LI, X ;

TANSLEY, TL .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (10) :5369-5371

← 1 2 →