OPTICAL AND ELECTRICAL CHARACTERIZATIONS OF LASER CHEMICAL-VAPOR-DEPOSITED ALUMINUM OXYNITRIDE FILMS

被引：43

作者：

DEMIRYONT, H

THOMPSON, LR

COLLINS, GJ

机构：

来源：

关键词：

D O I：

10.1063/1.336905

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3235 / 3240

页数：6

共 21 条

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[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (04) : 2906 - 2909
[5] BISTE L, 1977, PHYS STATUS SOLIDI A, V39, P173
[6] CHARACTERIZATION OF AL-ALOX AND SN-SNOX CERMET FILMS DEPOSITED BY REACTIVE EVAPORATION
DEMIRYONT, H
TEZEY, N
[J]. THIN SOLID FILMS, 1983, 101 (04) : 345 - 356
[7] DEMIRYONT H, APPL OPT
[8] DONNELEY VM, 1979, CHEM PHYS, V43, P218
[9] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS
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OSGOOD, RM
DEUTSCH, TF
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243
[10] FAVANNEC PN, 1977, THIN SOLID FILMS, V47, P327