SPUTTERED ZRO2 OVERCOAT WITH SUPERIOR CORROSION PROTECTION AND MECHANICAL PERFORMANCE IN THIN-FILM RIGID DISK APPLICATION

被引：55

作者：

YAMASHITA, T

CHEN, GL

SHIR, J

CHEN, T

机构：

[1] Komag Inc, Milpitas, CA, USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1988年 / 24卷 / 06期

关键词：

The authors gratefully acknowledge the help of Drs. C. Dong and H.C. Tong on the CSS and corrosion tests; Ms. L.H. Chan on the TEM micrographs; and Prof. R. Sinclair of Stanford University for his cooperation on the TEM studies. Furthermore; the collaboration of many researchers at Asahi Glass Co. Central Research Laboratory on this work is gratefully acknowledged;

D O I：

10.1109/20.92195

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2629 / 2634

页数：6

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