THE ETCHING MECHANISM OF TITANIUM POLYCIDE IN A MIXTURE OF SF6 AND O2

被引:8
作者
MANENSCHIJN, A
JANSSEN, GCAM
VANDERDRIFT, E
RADELAAR, S
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D O I
10.1063/1.342675
中图分类号
O59 [应用物理学];
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页码:3226 / 3235
页数:10
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    ZHANG, M
    LI, JZ
    ADESIDA, I
    WOLF, ED
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1037 - 1042
  • [53] 1960, LANDOLTBORNSTEIN Z A, V2, P39
  • [54] [No title captured]