共 54 条
- [51] WOLF ED, 1983, MICROCIRCUIT ENG, P415
- [52] REACTIVE ION ETCHING FOR SUB-MICRON STRUCTURES OF REFRACTORY-METAL SILICIDES AND POLYCIDES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1037 - 1042
- [53] 1960, LANDOLTBORNSTEIN Z A, V2, P39
- [54] [No title captured]