COMPOUND FORMATION AND KINETICS IN AL-PD2SI REACTIONS

[1] A KINETIC-MODEL FOR SOLID-STATE SILICIDE NUCLEATION [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (05) : 1826 - 1833

[2] PHASE FORMATION AND DISSOCIATION IN THE THIN-FILM PD/AL SYSTEM [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) : 2269 - 2274

[3] COLGAN EG, 1987, THESIS CORNELL U

[4] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03) : 344 - 351

[5] Ferro R., 1963, ATTI ACAD NAZ LINCEI, V34, P659

[6] MATERIAL REACTIONS AL/PD2SI/SI JUNCTIONS .2. KINETIC RATES [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) : 7445 - 7449

[7] ELECTRICAL AND MECHANICAL FEATURES OF PLATINUM SILICIDE-ALUMINUM REACTION [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (08) : 3476 - 3485

[8] KOKELEK E, 1978, THIN SOLID FILMS, V53, P135

[9] KOSTER U, 1982, J APPL PHYS, V53, P7436, DOI 10.1063/1.330113

[10] Liu J., UNPUB

[1] A KINETIC-MODEL FOR SOLID-STATE SILICIDE NUCLEATION [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (05) : 1826 - 1833

[2] PHASE FORMATION AND DISSOCIATION IN THE THIN-FILM PD/AL SYSTEM [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) : 2269 - 2274

[3] COLGAN EG, 1987, THESIS CORNELL U

[4] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03) : 344 - 351

[5] Ferro R., 1963, ATTI ACAD NAZ LINCEI, V34, P659

[6] MATERIAL REACTIONS AL/PD2SI/SI JUNCTIONS .2. KINETIC RATES [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) : 7445 - 7449

[7] ELECTRICAL AND MECHANICAL FEATURES OF PLATINUM SILICIDE-ALUMINUM REACTION [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (08) : 3476 - 3485

[8] KOKELEK E, 1978, THIN SOLID FILMS, V53, P135

[9] KOSTER U, 1982, J APPL PHYS, V53, P7436, DOI 10.1063/1.330113

[10] Liu J., UNPUB