MATERIAL REACTIONS AL/PD2SI/SI JUNCTIONS .2. KINETIC RATES

被引：11

作者：

HO, PS

LEWIS, JE

KOSTER, U

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 11期

关键词：

D O I：

10.1063/1.330114

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：7445 / 7449

页数：5

共 14 条

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[7]

KOSTER U, 1982, J APPL PHYS, V53, P7436, DOI 10.1063/1.330113

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[9]

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[10] REACTION-KINETICS IN AL-PD2SI-SI(100) JUNCTIONS [J].

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HO, PS ;

LIBERTINI, SH .

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