AUGER STUDY OF PREFERRED SPUTTERING ON BINARY ALLOY SURFACES

被引:223
作者
HO, PS
LEWIS, JE
WILDMAN, HS
HOWARD, JK
机构
[1] IBM CORP THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA
[2] IBM CORP, DIV SYST PROD, HOPEWELL JUNCTION, NY 12533 USA
关键词
D O I
10.1016/0039-6028(76)90191-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:393 / 405
页数:13
相关论文
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