STUDY OF PD2SI FILMS ON SILICON USING AUGER-ELECTRON SPECTROSCOPY

被引：36

作者：

FERTIG, DJ ^{[1
]}

ROBINSON, GY ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

SOLID-STATE ELECTRONICS | 1976年 / 19卷 / 05期

关键词：

D O I：

10.1016/0038-1101(76)90079-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：407 / 413

页数：7

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