MICROSTRUCTURAL MODIFICATIONS IN DIAMOND-LIKE CARBON THIN-FILMS CAUSED BY HIGH-ENERGY ION IRRADIATION

被引：43

作者：

BARSHILIA, HC ^{[1
]}

SAH, S ^{[1
]}

MEHTA, BR ^{[1
]}

VANKAR, VD ^{[1
]}

AVASTHI, DK ^{[1
]}

JAIPAL ^{[1
]}

MEHTA, GK ^{[1
]}

机构：

[1] NUCL SCI CTR,NEW DELHI 110067,INDIA

来源：

THIN SOLID FILMS | 1995年 / 258卷 / 1-2期

关键词：

DIAMOND; INFRARED SPECTROSCOPY; ION BOMBARDMENT; RAMAN SCATTERING;

D O I：

10.1016/0040-6090(95)80049-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of high energy (85 MeV) nickel ions on diamond-like carbon thin films, deposited by microwave discharge of acetylene and methane gases mixed with hydrogen, has been investigated. IR, Raman and spectroscopic ellipsometry studies of irradiated and as-deposited films show large changes in their microstructural features. The effects of irradiation on films prepared from acetylene-hydrogen and methane-hydrogen gas mixtures are very different. Such a behaviour is proposed to be due to the microstructural variations in the as-deposited films.

引用

页码：123 / 127

页数：5

共 23 条

[1] ELECTRON-SPIN-RESONANCE INVESTIGATION OF ION-BEAM MODIFIED AMORPHOUS HYDROGENATED (DIAMOND-LIKE) CARBON [J].