STRUCTURE AND PHYSICAL-PROPERTIES OF PLASMA-GROWN AMORPHOUS HYDROGENATED CARBON-FILMS

被引：230

作者：

COUDERC, P

CATHERINE, Y

机构：

[1] CNRS, Nantes, Fr, CNRS, Nantes, Fr

来源：

THIN SOLID FILMS | 1987年 / 146卷 / 01期

关键词：

D O I：

10.1016/0040-6090(87)90343-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

35

引用

收藏

页码：93 / 107

页数：15

相关论文

共 36 条

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