ELECTRICAL CHARACTERISTICS AND GROWTH-KINETICS IN DISCHARGES USED FOR PLASMA DEPOSITION OF AMORPHOUS-CARBON

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5

[3] DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA [J]. THIN SOLID FILMS, 1979, 58 (01) : 117 - 120

[4] MEASUREMENT OF PENNING IONIZATION CROSS SECTIONS FOR HELIUM 2S-3 METASTABLES USING A STEADY-STATE FLOWING AFTERGLOW METHOD [J]. JOURNAL OF PHYSICS PART B ATOMIC AND MOLECULAR PHYSICS, 1970, 3 (01): : 61 - +

[5] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4590 - 4595

[6] CARCHANO H, 1973, THESIS TOULOUSE

[7] GLOW-DISCHARGE DEPOSITION OF TETRAMETHYLSILANE FILMS [J]. PLASMA CHEMISTRY AND PLASMA PROCESSING, 1985, 5 (04) : 353 - 368

[8] CATHERINE Y, 1982, VIDE COUCHES MINCES, V212, P125

[9] CATHERINE Y, 1985, 5TH P S PLASM PROC, V85, P317

[10] ION CHEMISTRY IN SILANE DC DISCHARGES [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) : 159 - 169

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5

[3] DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA [J]. THIN SOLID FILMS, 1979, 58 (01) : 117 - 120

[4] MEASUREMENT OF PENNING IONIZATION CROSS SECTIONS FOR HELIUM 2S-3 METASTABLES USING A STEADY-STATE FLOWING AFTERGLOW METHOD [J]. JOURNAL OF PHYSICS PART B ATOMIC AND MOLECULAR PHYSICS, 1970, 3 (01): : 61 - +

[5] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4590 - 4595

[6] CARCHANO H, 1973, THESIS TOULOUSE

[7] GLOW-DISCHARGE DEPOSITION OF TETRAMETHYLSILANE FILMS [J]. PLASMA CHEMISTRY AND PLASMA PROCESSING, 1985, 5 (04) : 353 - 368

[8] CATHERINE Y, 1982, VIDE COUCHES MINCES, V212, P125

[9] CATHERINE Y, 1985, 5TH P S PLASM PROC, V85, P317

[10] ION CHEMISTRY IN SILANE DC DISCHARGES [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) : 159 - 169