ION CHEMISTRY IN SILANE DC DISCHARGES

[1] A MONTE-CARLO ANALYSIS OF AN ELECTRON SWARM IN A NONUNIFORM FIELD - THE CATHODE REGION OF A GLOW-DISCHARGE IN HELIUM [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (11) : 2169 - 2187

[2] TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J]. JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) : 1770 - 1777

[3] CHATHAM H, 1984, THESIS U COLORADO

[4] Chen Hai An, COMMUNICATION

[5] DREVILLION B, 1980, APPL PHYS LETT, V37, P648

[6] DRYVESTEYN MJ, 1940, REV MOD PHYS, V12, P87

[7] ENHANCEMENT OF CHARGE-TRANSFER REACTION-RATE CONSTANTS BY VIBRATIONAL-EXCITATION AT KINETIC ENERGIES BELOW 1-EV [J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 79 (01) : 265 - 272

[8] ELLIS W, 1973, AT DATA NUCL DATA TA, V17, P177

[9] FRANCIS G, 1956, HDB PHYSIK, V22, P53

[10] ELECTRON KINETICS OF SILANE DISCHARGES [J]. APPLIED PHYSICS LETTERS, 1983, 43 (11) : 1012 - 1014

[1] A MONTE-CARLO ANALYSIS OF AN ELECTRON SWARM IN A NONUNIFORM FIELD - THE CATHODE REGION OF A GLOW-DISCHARGE IN HELIUM [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (11) : 2169 - 2187

[2] TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J]. JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) : 1770 - 1777

[3] CHATHAM H, 1984, THESIS U COLORADO

[4] Chen Hai An, COMMUNICATION

[5] DREVILLION B, 1980, APPL PHYS LETT, V37, P648

[6] DRYVESTEYN MJ, 1940, REV MOD PHYS, V12, P87

[7] ENHANCEMENT OF CHARGE-TRANSFER REACTION-RATE CONSTANTS BY VIBRATIONAL-EXCITATION AT KINETIC ENERGIES BELOW 1-EV [J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 79 (01) : 265 - 272

[8] ELLIS W, 1973, AT DATA NUCL DATA TA, V17, P177

[9] FRANCIS G, 1956, HDB PHYSIK, V22, P53

[10] ELECTRON KINETICS OF SILANE DISCHARGES [J]. APPLIED PHYSICS LETTERS, 1983, 43 (11) : 1012 - 1014