ELECTRON KINETICS OF SILANE DISCHARGES

被引：51

作者：

GARSCADDEN, A ^{[1
]}

DUKE, GL ^{[1
]}

BAILEY, WF ^{[1
]}

机构：

[1] USAF,INST TECHNOL,WRIGHT PATTERSON AFB,OH 45433

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 11期

关键词：

D O I：

10.1063/1.94226

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1012 / 1014

页数：3

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