IMPURITY STRIATIONS IN CZOCHRALSKI GROWN AL-DOPED SI SINGLE-CRYSTALS

被引：6

作者：

JINDAL, BK ^{[1
]}

KARELIN, VV ^{[1
]}

TILLER, WA ^{[1
]}

机构：

[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 01期

关键词：

D O I：

10.1149/1.2403377

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：101 / 105

页数：5

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