AN AUTOMATIC TEST SET FOR MEASURING DOPING PROFILE OF SEMICONDUCTOR EPITAXIAL LAYERS

被引：7

作者：

CALIFANO, FP

LUCIANO, A

机构：

来源：

关键词：

D O I：

10.1063/1.1684664

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：865 / &

共 5 条

[1] COPELAND JA, 1969, IEEE T ELECTRON DEVI, VED16, P445
[2] A PROPOSED METHOD FOR RAPID DETERMINATION OF DOPING PROFILES IN SEMICONDUCTOR LAYERS
LEENOV, D
STEWART, RG
[J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1968, 56 (11): : 2095 - &
[3] AN AUTOMATIC TEST SET FOR MEASURING DOPANT CONCENTRATION PROFILES IN EPITAXIAL FILMS
REUTLINGER, GW
REGAS, SJ
SIDOR, DJ
SCHWARTZ, B
[J]. SOLID-STATE ELECTRONICS, 1969, 12 (01) : 31 - +
[4] Van der Ziel A., 1968, SOLID STATE PHYSICAL, P266
[5] WIDLAR RJ, 1966, OPTIMUM UTILIZATION