SCANNING TUNNELING MICROSCOPE TIP-INDUCED ANODIZATION OF TITANIUM - CHARACTERIZATION OF THE MODIFIED SURFACE AND APPLICATION TO THE METAL RESIST PROCESS FOR NANOLITHOGRAPHY

被引：38

作者：

SUGIMURA, H ^{[1
]}

UCHIDA, T ^{[1
]}

KITAMURA, N ^{[1
]}

MASUHARA, H ^{[1
]}

机构：

[1] RES DEV CORP JAPAN,ERATO,MICROPHOTOCONVERS PROJECT,SAKYO KU,KYOTO 606,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 05期

关键词：

D O I：

10.1116/1.587208

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanometer scale oxide patterns were fabricated on titanium (Ti) surfaces on the basis of scanning tunneling microscope (STM) tip-induced anodization. The spatial resolution of the method was limited to approximately 20 nm, owing to the surface roughness of the Ti film used. Chemical analyses of fabricated patterns by Auger electron spectroscopy proved that the surface chemical composition of the pattern was titanium dioxide (TiO2), and the oxide thickness on the pattern was certainly thicker than that of the native oxide on the unmodified area. A novel Ti-metal resist process for nanolithography based on STM tip-induced anodization was proposed. The Ti film on which anodized patterns were formed could be etched by hydrofluoric acid using the anodic oxide patterns as an etching mask. Ti lines of similar to 60 nm in width were successfully fabricated by the present method.

引用

页码：2884 / 2888

页数：5

共 18 条

[1] SELECTIVE-AREA EPITAXIAL-GROWTH OF GALLIUM-ARSENIDE ON SILICON SUBSTRATES PATTERNED USING A SCANNING TUNNELING MICROSCOPE OPERATING IN AIR [J].

DAGATA, JA ;

TSENG, W ;

BENNETT, J ;

EVANS, CJ ;

SCHNEIR, J ;

HARARY, HH .

APPLIED PHYSICS LETTERS, 1990, 57 (23) :2437-2439

[2] MODIFICATION OF HYDROGEN-PASSIVATED SILICON BY A SCANNING TUNNELING MICROSCOPE OPERATING IN AIR [J].

DAGATA, JA ;

SCHNEIR, J ;

HARARY, HH ;

EVANS, CJ ;

POSTEK, MT ;

BENNETT, J .

APPLIED PHYSICS LETTERS, 1990, 56 (20) :2001-2003

[3] PATTERN GENERATION ON SEMICONDUCTOR SURFACES BY A SCANNING TUNNELING MICROSCOPE OPERATING IN AIR [J].

DAGATA, JA ;

SCHNEIR, J ;

HARARY, HH ;

BENNETT, J ;

TSENG, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :1384-1388

[4] INTEGRATION OF SCANNING TUNNELING MICROSCOPE NANOLITHOGRAPHY AND ELECTRONICS DEVICE PROCESSING [J].

DAGATA, JA ;

TSENG, W ;

BENNETT, J ;

DOBISZ, EA ;

SCHNEIR, J ;

HARARY, HH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1992, 10 (04) :2105-2113

[5] SELECTIVE AREA OXIDATION OF SILICON WITH A SCANNING FORCE MICROSCOPE [J].

DAY, HC ;

ALLEE, DR .

APPLIED PHYSICS LETTERS, 1993, 62 (21) :2691-2693

[6]

DIGGLE JW, 1972, ANODIC BEHAVIOR META

[7] SCANNING TUNNELING MICROSCOPY AND TUNNELING SPECTROSCOPY OF THE N-TIO2(001) SURFACE [J].

FAN, FRF ;

BARD, AJ .

JOURNAL OF PHYSICAL CHEMISTRY, 1990, 94 (09) :3761-3766

[8]

Melliar-Smith C. M., 1978, THIN FILM PROCESSES

[9] MOLECULAR-ORBITAL EFFECTS ON TI LMV AUGER-SPECTRA OF TIO AND TIO2 [J].

SOLOMON, JS ;

BAUN, WL .

SURFACE SCIENCE, 1975, 51 (01) :228-236

[10] SCANNING TUNNELING MICROSCOPE TIP-INDUCED ANODIZATION FOR NANOFABRICATION OF TITANIUM [J].

SUGIMURA, H ;

UCHIDA, T ;

KITAMURA, N ;

MASUHARA, H .

JOURNAL OF PHYSICAL CHEMISTRY, 1994, 98 (16) :4352-4357

← 1 2 →