DEPOSITION OF HYDROGENATED AMORPHOUS-CARBON FILMS BY AN ECR MICROWAVE PLASMA

被引：4

作者：

SCHARFF, W

HAMMER, K

EIBISCH, B

STENZEL, O

ROTH, S

FRAUENHEIM, T

机构：

[1] Technische Univ Karl-Marx-Stadt, Germany

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1989年 / 112卷 / 02期

关键词：

21;

D O I：

10.1002/pssa.2211120222

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：667 / 677

页数：11

共 21 条

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[9] HYDROGENATED CARBON-FILMS PRODUCED BY SPUTTERING IN ARGON HYDROGEN MIXTURES
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