A REVIEW OF RECENT WORK ON HARD I-C FILMS

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] PHYSICS OF ION PLATING AND ION-BEAM DEPOSITION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 104 - 107

[3] PROPERTIES AND COATING RATES OF DIAMOND-LIKE CARBON-FILMS PRODUCED BY RF GLOW-DISCHARGE OF HYDROCARBON GASES [J]. THIN SOLID FILMS, 1979, 63 (01) : 155 - 160

[4] INITIAL ETCHING IN AN RF BUTANE PLASMA [J]. VACUUM, 1978, 28 (10-1) : 449 - 451

[5] DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA [J]. THIN SOLID FILMS, 1979, 58 (01) : 117 - 120

[6] STRUCTURE AND PROPERTIES OF TRANSPARENT AND HARD CARBON-FILMS [J]. SURFACE SCIENCE, 1979, 86 (JUL) : 308 - 313

[7] EBERSBACH U, 1979, Z PHYS CHEM-LEIPZIG, V260, P938

[8] FRICTIONAL-PROPERTIES OF DIAMOND-LIKE CARBON LAYERS [J]. APPLIED PHYSICS LETTERS, 1980, 36 (04) : 291 - 292

[9] DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J]. THIN SOLID FILMS, 1976, 38 (02) : L17 - L19

[10] GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA [J]. THIN SOLID FILMS, 1979, 58 (01) : 107 - 116

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +

[2] PHYSICS OF ION PLATING AND ION-BEAM DEPOSITION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 104 - 107

[3] PROPERTIES AND COATING RATES OF DIAMOND-LIKE CARBON-FILMS PRODUCED BY RF GLOW-DISCHARGE OF HYDROCARBON GASES [J]. THIN SOLID FILMS, 1979, 63 (01) : 155 - 160

[4] INITIAL ETCHING IN AN RF BUTANE PLASMA [J]. VACUUM, 1978, 28 (10-1) : 449 - 451

[5] DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA [J]. THIN SOLID FILMS, 1979, 58 (01) : 117 - 120

[6] STRUCTURE AND PROPERTIES OF TRANSPARENT AND HARD CARBON-FILMS [J]. SURFACE SCIENCE, 1979, 86 (JUL) : 308 - 313

[7] EBERSBACH U, 1979, Z PHYS CHEM-LEIPZIG, V260, P938

[8] FRICTIONAL-PROPERTIES OF DIAMOND-LIKE CARBON LAYERS [J]. APPLIED PHYSICS LETTERS, 1980, 36 (04) : 291 - 292

[9] DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J]. THIN SOLID FILMS, 1976, 38 (02) : L17 - L19

[10] GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA [J]. THIN SOLID FILMS, 1979, 58 (01) : 107 - 116