PROPERTIES AND COATING RATES OF DIAMOND-LIKE CARBON-FILMS PRODUCED BY RF GLOW-DISCHARGE OF HYDROCARBON GASES

We studied the properties of films produced by cracking various hydrocarbon gases in an r.f. glow discharge. Mass spectrometry studies and optical spectroscopy of the glow discharge were performed during the experiments. We found that the production rates for the films increased with the molecular weight for gases having the same structural form, e.g. C4H10 had a higher coating rate than CH4 under the same plasma conditions. Also the sputter-etch rate of the films depended on both the substrate material and the hydrocarbon gas used. Films several microns thick were manufactured onto steel substrates and showed a microhardness of more than 3000 kgf mm-2. © 1979.