COMPARISON OF SN-ION-IMPLANTED, GE-ION-IMPLANTED, SE-ION-IMPLANTED AND TE-ION-IMPLANTED GAAS

被引:15
作者
SURRIDGE, RK [1 ]
SEALY, BJ [1 ]
机构
[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND
关键词
D O I
10.1088/0022-3727/10/6/014
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:911 / 917
页数:7
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