COMPOSITION AND MECHANICAL-PROPERTIES OF RF-SPUTTERED AMORPHOUS-SILICON CARBIDE COATING

被引：3

作者：

HUANG, JS

OHLAND, M

WILLIAMS, WS

机构：

[1] Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1992年 / 75卷 / 09期

关键词：

D O I：

10.1111/j.1151-2916.1992.tb05627.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Thin films of amorphous silicon carbide, synthesized by sputtering from Si single-crystal and high-purity graphite targets and deposited on Si crystals and fused silica, were studied with respect to their chemical composition and their influence on the mechanical properties of the substrates. Specifically, data were taken for microhardness, static friction, and sliding friction. The results suggest some improvement in these properties from amorphous SiC coatings, though breakup of very thin SiC films under load can be detrimental.

引用

页码：2623 / 2626

页数：4

共 7 条

[1] THIN COATINGS ON CARBON-FIBERS AS DIFFUSION BARRIERS AND WETTING AGENTS IN AL COMPOSITES [J].