NANOMETER-SCALE PATTERNING AND OXIDATION OF SILICON SURFACES WITH AN ULTRAHIGH-VACUUM SCANNING TUNNELING MICROSCOPE

被引：74

作者：

LYDING, JW ^{[1
]}

ABELN, GC ^{[1
]}

SHEN, TC ^{[1
]}

WANG, C ^{[1
]}

TUCKER, JR ^{[1
]}

机构：

[1] UNIV ILLINOIS, BECKMAN INST, URBANA, IL 61801 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587433

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3735 / 3740

页数：6

共 21 条

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