AN APPROXIMATE ANALYSIS OF STRESSES IN MULTILAYERED ELASTIC THIN-FILMS

被引：175

作者：

SUHIR, E

机构：

[1] AT and T Bell Laboratories, Murray Hill, NJ, 07974, United States

来源：

JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME | 1988年 / 55卷 / 01期

关键词：

D O I：

10.1115/1.3173620

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

引用

页码：143 / 148

页数：6

共 11 条

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SUHIR, E .

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OLSEN, GH ;

ETTENBERG, M .

[4] INTERFACE STRESS OF ALXGA1-XAS-GAAS LAYER STRUCTURES [J].

REINHART, FK ;

LOGAN, RA .

[5]

ROLL K, 1976, J APPL PHYS, V47, P3224, DOI 10.1063/1.323119

[6] The tension of metallic films deposited by electrolysis [J].

Stoney, GG .

[7]

SUHIR E, 1986, 1986 INT S MICR P AT, P383

[8]

SUHIR E, 1986, UNPUB 1986 ASME WAM

[9]

SUHIR E, 1986, ASME, V53, P657

[10]

SUHIR E, 1986, MATER RES SOC S P, V72, P133