AVERAGING OF ELECTRON-BEAM ABERRATIONS

[1] THEORY OF ABERRATION MIXING IN ELECTRON-OPTICAL SYSTEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1098 - 1101

[2] THERMAL VELOCITY EFFECTS IN AXIALLY SYMMETRIC SOLID BEAMS [J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (12) : 3479 - &

[3] ELECTRON OPTICS OF AN ELECTRON-BEAM LITHOGRAPHIC SYSTEM [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1977, 21 (06) : 514 - 521

[4] MUNRO E, 1974, OPTIK, V39, P450

[5] CALCULATION OF HEAT-AFFECTED ZONE DURING PULSED ELECTRON-BEAM MACHINING [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (04) : 224 - &

[1] THEORY OF ABERRATION MIXING IN ELECTRON-OPTICAL SYSTEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1098 - 1101

[2] THERMAL VELOCITY EFFECTS IN AXIALLY SYMMETRIC SOLID BEAMS [J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (12) : 3479 - &

[3] ELECTRON OPTICS OF AN ELECTRON-BEAM LITHOGRAPHIC SYSTEM [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1977, 21 (06) : 514 - 521

[4] MUNRO E, 1974, OPTIK, V39, P450

[5] CALCULATION OF HEAT-AFFECTED ZONE DURING PULSED ELECTRON-BEAM MACHINING [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (04) : 224 - &