CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE POWDERS USING PULSED CO2-LASERS

被引：9

作者：

SCHOLZ, M

FUSS, W

KOMPA, KL

机构：

[1] Max-Planck-Institut Für Quantenoptik, Garching, W-8046

来源：

ADVANCED MATERIALS | 1993年 / 5卷 / 01期

关键词：

D O I：

10.1002/adma.19930050106

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A carbosilane polymer which survives temperatures up to 2000-degrees-C is reported. It deposits on the surface of SiC particulates which form during the laser pyrolysis of tetramethylsilane, and has possible applications as a sintering aid for SiC or in reducing brittleness in ceramic composites. Powders consisting of 8-10 nm SiC crystallites embedded in the carbosilane polymer are produced in the plasma formed by a focused CO2 laser.

引用

页码：38 / 40

页数：3

共 21 条

[1]

Bellamy L.J., 1975, INFRARED SPECTRA COM

[2] PULSED CO2 LASER-DRIVEN PRODUCTION OF ULTRAFINE SILICON, SILICON-CARBIDE, SILICON-NITRIDE AND SILICON OXYNITRIDE POWDERS [J].

BORSELLA, E ;

CANEVE, L ;

FANTONI, R ;

PICCIRILLO, S .

NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1989, 11 (03) :487-493

[3]

BORSELLA E, 1988, APPL SURF SCI, V36, P213

[4] SINTERABLE CERAMIC POWDERS FROM LASER-DRIVEN REACTIONS .1. PROCESS DESCRIPTION AND MODELING [J].