INVESTIGATION OF LASER-INDUCED SILANE HYDROCARBON REACTIONS IN THE FORMATION OF SI AND SIC POWDERS

被引：9

作者：

FANTONI, R ^{[1
]}

BIJNEN, F ^{[1
]}

PICCIRILLO, S ^{[1
]}

ENZO, S ^{[1
]}

机构：

[1] UNIV VENICE,DEPARTIMENTO CHIM FIS,VENICE,ITALY

来源：

CHEMICAL PHYSICS | 1990年 / 147卷 / 2-3期

关键词：

D O I：

10.1016/0301-0104(90)85053-Y

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Broadband CARS technique has been employed to monitor on-line the gas-phase reactions involved in IR photodissociation of SiH4 in the presence of different hydrocarbons (CH4, C2H2, C2H4, C2H6). The experiment has been performed in a flow reactor where a low power (up to 50 W ) cw CO2 laser tuned at 944.19 cm-1 was focused. Space-resolved detection of reactants dissociation and primary products formation has been performed on the reaction flame. Evidence of C2 formed in ground and electronically excited states has been found. Off-line diagnostics have been used to characterize the final products, which resulted to be ultrafine Si and SiC powders with different crystalline phases according to the average reaction temperature. © 1990.

引用

页码：389 / 400

页数：12

共 29 条

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