STATE-SELECTIVE SPECTROSCOPIC DETECTION OF REACTION-PRODUCTS (SIH2, SI) IN THE IR LASER DECOMPOSITION OF SIH4

被引：23

作者：

BORSELLA, E

FANTONI, R

机构：

来源：

CHEMICAL PHYSICS LETTERS | 1988年 / 150卷 / 06期

关键词：

D O I：

10.1016/0009-2614(88)87244-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：542 / 546

页数：5

共 17 条

[1]

Bashkin S., 1975, ATOMIC ENERGY LEVELS, V1

[2] FREQUENCY AND TIME RESOLVED LUMINESCENCE OF INTERMEDIATE REACTION-PRODUCTS IN IR LASER DECOMPOSITION OF SILANE [J].

BORSELLA, E ;

CANEVE, L .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1988, 46 (04) :347-355

[3]

BORSELLA E, 1987, EUROPEAN MATERIAL RE, V15, P205

[4]

BOYD IW, 1987, SPRINGER SERIES MATE, V3

[5] 2-PHOTON LASER-INDUCED FLUORESCENCE AND 2+1 MULTIPHOTON IONIZATION OF SILICON ATOMS [J].

BREWER, PD .

CHEMICAL PHYSICS LETTERS, 1987, 136 (06) :557-561

[6]

CANNON RW, 1981, J AM CERAM SOC, V65, P324

[7] A MATHEMATICAL-MODEL OF THE COUPLED FLUID-MECHANICS AND CHEMICAL-KINETICS IN A CHEMICAL VAPOR-DEPOSITION REACTOR [J].

COLTRIN, ME ;

KEE, RJ ;

MILLER, JA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) :425-434

[8] DISSOCIATION DYNAMICS OF LOW-LYING ELECTRONIC STATES OF SIH2 [J].

FRANCISCO, JS ;

BARNES, R ;

THOMAN, JW .

JOURNAL OF CHEMICAL PHYSICS, 1988, 88 (04) :2334-2341

[9] LASER POWERED HOMOGENEOUS PYROLYSIS OF SILANE [J].

JASINSKI, JM ;

ESTES, RD .

CHEMICAL PHYSICS LETTERS, 1985, 117 (05) :495-499

[10] INFRARED MULTI-PHOTON DECOMPOSITION OF MONOSILANE [J].

LONGEWAY, PA ;

LAMPE, FW .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1981, 103 (23) :6813-6818

← 1 2 →