ENERGY SPREADING IN THE HYDROGEN FIELD-IONIZATION SOURCE

被引：40

作者：

HANSON, GR ^{[1
]}

SIEGEL, BM ^{[1
]}

机构：

[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571238

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1176 / 1181

页数：6

共 19 条

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[8] ANGULAR INTENSITY OF A GAS-PHASE FIELD-IONIZATION SOURCE [J].

ORLOFF, J ;

SWANSON, LW .

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[9] HIGH-RESOLUTION, ION-BEAM PROCESSES FOR MICROSTRUCTURE FABRICATION [J].

SELIGER, RL ;

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OLNEY, RD ;

WARD, JW ;

WANG, V .

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