H-2 AND RARE-GAS FIELD-ION SOURCE WITH HIGH ANGULAR CURRENT

被引：58

作者：

HANSON, GR

SIEGEL, BM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570317

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1875 / 1878

页数：4

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