MICROFABRICATION IN LINBO3 BY ION-BOMBARDMENT-ENHANCED ETCHING

被引：23

作者：

KAWABE, M

KUBOTA, M

MASUDA, K

NAMBA, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期

关键词：

Compendex;

D O I：

10.1116/1.569517

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

INTEGRATED OPTICS

引用

页码：1096 / 1098

页数：3

共 8 条

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[5] ION-BEAM ETCHING OF SURFACE GRATINGS [J].

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BROGAN, WT .

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[6] DRY PROCESSING OF HIGH-RESOLUTION AND HIGH ASPECT RATIO STRUCTURES IN GAAS-ALXGA1-XAS FOR INTEGRATED-OPTICS [J].

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CASEY, HC .

APPLIED OPTICS, 1977, 16 (01) :126-136

[7]

TSURUSHIMA T, 1976, T IEE JPN, P527

[8]

Winterbon K.B., 1975, ION IMPLANTATION RAN, V2

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