CHEMISORPTION OF FLUOROCARBON FREE-RADICALS ON SILICON AND SIO2

被引：30

作者：

JOYCE, S

LANGAN, JG

STEINFELD, JI

机构：

来源：

JOURNAL OF CHEMICAL PHYSICS | 1988年 / 88卷 / 03期

关键词：

D O I：

10.1063/1.454077

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：2027 / 2032

页数：6

共 36 条

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