RADIATION EVALUATION OF COMMERCIAL FERROELECTRIC NONVOLATILE MEMORIES

被引:28
作者
BENEDETTO, JM [1 ]
DELANCEY, WM [1 ]
OLDHAM, TR [1 ]
MCGARRITY, JM [1 ]
TIPTON, CW [1 ]
BRASSINGTON, M [1 ]
FISCH, DE [1 ]
机构
[1] NATL SEMICOND CORP,SANTA CLARA,CA 95052
关键词
D O I
10.1109/23.124125
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ferroelectric (FE) on complementary metal-oxide semiconductor (CMOS) 4-kbit nonvolatile memories, 8-bit octal latches (with and without FE), and process control test chips were used to establish a baseline characterization of the radiation response of CMOS/FE integrated devices and to determine whether the additional FE processing caused significant degradation to the baseline CMOS process. Functional failure of all 4-kbit memories and octal latches occurred at total doses of between 2 and 4 krad(Si), most likely due to field-oxide effects in the underlying CMOS. No significant difference was observed between the radiation response of devices with and without the FE film in this commercial process.
引用
收藏
页码:1410 / 1414
页数:5
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