STRUCTURES OF STEPS AND APPEARANCES OF (311)FACETS ON SI(100) SURFACES

被引:105
作者
OSHIYAMA, A
机构
[1] Fundamental Research Laboratories, NEC Corporation, Miyukigaoka
关键词
D O I
10.1103/PhysRevLett.74.130
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
First-principles total-energy calculations for structures and reactivities of single-, double-, and quadrilayer steps on Si(100) surfaces are presented. It is found that an activation energy for diffusion of an adatom on an upper terrace increases near a step edge and that rebonded and nonrebonded steps show bistability. A new reaction pathway in which the rebonded double-layer steps bunch and lead to a {311} facet is found to be energetically favorable. © 1994 The American Physical Society.
引用
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页码:130 / 133
页数:4
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