DECELERATION ION OPTICAL-SYSTEM FOR SPUTTERING MEASUREMENTS BETWEEN 50 AND 500 EV AS FUNCTION OF ANGLE OF INCIDENCE

被引：20

作者：

LIEBL, H

BOHDANSKY, J

ROTH, J

DOSE, V

机构：

来源：

关键词：

D O I：

10.1063/1.1139527

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1830 / 1832

页数：3

共 7 条

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[4] Harting E., 1976, ELECTROSTATIC LENSES
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[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (04) : 478 - 499
[6] ROTH J, 1979, IPP926
[7] FIELD-EMISSION ILLUMINATION SYSTEM USING A NEW OPTICAL CONFIGURATION
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