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PHYSICAL VAPOR-DEPOSITION TECHNIQUES FOR THE GROWTH OF YBA2CU3O7 THIN-FILMS

被引：99
作者：
HUMPHREYS, RG
SATCHELL, JS
CHEW, NG
EDWARDS, JA
GOODYEAR, SW
BLENKINSOP, SE
DOSSER, OD
CULLIS, AG
机构：
[1] R. SignalsandRadar Establ, Malvern
来源：
SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 1990年 / 3卷 / 01期
关键词：
D O I：
10.1088/0953-2048/3/1/006
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The growth and characterisation of YBa2Cu3O7 thin films are reviewed. The discussion of growth is limited to the physical vapour deposition techniques of laser ablation, sputtering and evaporation. Emphasis is placed on the practical problems of growing epitaxial films in situ and characterising them. © 1990 IOP Publishing Ltd.
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页码：38 / 52
页数：15
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