X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION OF FLUOROCARBON LUBRICANT FILMS

被引:15
作者
NOEL, S
BOYER, L
BODIN, C
机构
[1] Laboratoire de Genie Electrique de Paris, Ecole Superieure d'Electricite, Universites Paris VI et Paris XI, U.R.A. CKR.S.D0127, 91192 Gif-sur- Yvette Cedex, Plateau du Moulon.
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1991年 / 9卷 / 01期
关键词
D O I
10.1116/1.577126
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Fluorocarbon lubricants are of great interest in many applications where they are used in very thin layers. Control of the lubricant presence is easily performed by a surface analysis technique such as x-ray photoelectron spectroscopy. However, the interpretation of the spectra is not straightforward. A simple electronegativity description of the charge shifts is developed from the group electronegativity and the Sanderson equalization approaches. It is applied to two types of high molecular weight molecules, and allows us to assign the experimental photoelectron spectra of the two fluorocarbon lubricants under study.
引用
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页码:32 / 38
页数:7
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