HOMOGENEITY OF AMORPHOUS GD-CO FILMS PREPARED BY BIAS SPUTTERING

[1] AMORPHOUS MATERIALS FOR MICROMETER AND SUBMICROMETER BUBBLE-DOMAIN TECHNOLOGY [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1976, 20 (03) : 271 - 281

[2] BYSTROV MV, 1976, FIZ TVERD TELA+, V18, P851

[3] STEADY-STATE MASS BALANCE APPROACH TO SUBSTRATE BIASED RF SPUTTERING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (04): : 965 - 968

[4] ESHO S, 1975, 7 P C SOL STAT DEV T, P93

[5] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) : 55 - &

[6] HERTZ G, 1968, EINFUHRUNG PLASMAPHY

[7] Hippel AV, 1926, ANN PHYSIK, V81, P1043

[8] RF SPUTTERING [J]. THIN SOLID FILMS, 1970, 5 (04) : 209 - &

[9] Maissel L.I., 1970, HDB THIN FILM TECHNO

[10] MAGNETIZATION REVERSAL IN THIN MAGNETIC-FILMS WITH IN-PLANE COMPENSATION WALLS [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 36 (02): : 617 - 626

[1] AMORPHOUS MATERIALS FOR MICROMETER AND SUBMICROMETER BUBBLE-DOMAIN TECHNOLOGY [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1976, 20 (03) : 271 - 281

[2] BYSTROV MV, 1976, FIZ TVERD TELA+, V18, P851

[3] STEADY-STATE MASS BALANCE APPROACH TO SUBSTRATE BIASED RF SPUTTERING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (04): : 965 - 968

[4] ESHO S, 1975, 7 P C SOL STAT DEV T, P93

[5] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) : 55 - &

[6] HERTZ G, 1968, EINFUHRUNG PLASMAPHY

[7] Hippel AV, 1926, ANN PHYSIK, V81, P1043

[8] RF SPUTTERING [J]. THIN SOLID FILMS, 1970, 5 (04) : 209 - &

[9] Maissel L.I., 1970, HDB THIN FILM TECHNO

[10] MAGNETIZATION REVERSAL IN THIN MAGNETIC-FILMS WITH IN-PLANE COMPENSATION WALLS [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 36 (02): : 617 - 626