DETERMINATION OF CONCENTRATION DEPTH-PROFILES BY ANGLE-DEPENDENT XPS AND AES DATA

被引：19

作者：

BORODYANSKY, SE

ABASHKIN, YG

机构：

[1] All-Union Research Center for Surface and Vacuum Investigations (VNICPV), Moscow, 117334

来源：

SURFACE SCIENCE | 1991年 / 251卷

关键词：

D O I：

10.1016/0039-6028(91)91007-K

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A technique for non-destructive determination of concentration depth-profiles from angle-dependent XPS or AES data is presented. The problem is reduced to a set of linear equations which can be solved numerically with the simplest regularization. The effect of measurement error on the accuracy of determination is investigated. The technique can be applied to the solution of any problem concerning smooth profile determination. Simulated data were used to check our method.

引用

页码：325 / 329

页数：5

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