DECONVOLUTION OF CONCENTRATION DEPTH PROFILES FROM ANGLE RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY DATA

[1] Bellman R, 1966, NUMERICAL INVERSION, DOI DOI 10.2307/2004790

[2] Fadley C. S., 1976, Progress in Solid State Chemistry, V11, P265, DOI 10.1016/0079-6786(76)90013-3

[3] SURFACE ANALYSIS AND ANGULAR-DISTRIBUTIONS IN X-RAY PHOTOELECTRON-SPECTROSCOPY [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 4 (02) : 93 - 137

[4] FADLEY CS, 1985, PROGR SURFACE SCI

[5] SURFACE SENSITIVITY AND ANGULAR DEPENDENCE OF X-RAY PHOTOELECTRON SPECTRA [J]. SURFACE SCIENCE, 1973, 36 (02) : 661 - 674

[6] ULTRASOFT-X-RAY REFLECTION, REFRACTION, AND PRODUCTION OF PHOTOELECTRONS (100-1000-EV REGION) [J]. PHYSICAL REVIEW A, 1972, 6 (01): : 94 - &

[7] PROPERTIES OF OXIDIZED SILICON AS DETERMINED BY ANGULAR-DEPENDENT X-RAY PHOTOELECTRON-SPECTROSCOPY [J]. CHEMICAL PHYSICS LETTERS, 1976, 44 (02) : 225 - 231

[8] CHARACTERIZATION OF CONTAMINATION LAYERS BY EMISSION ANGLE DEPENDENT XPS WITH A DOUBLE-PASS CMA [J]. SURFACE AND INTERFACE ANALYSIS, 1984, 6 (02) : 75 - 77

[9] Hofmann S., 1982, J TRACE MICROPROBE T, V1, P213

[10] DETERMINATION OF DEPTH PROFILES BY ANGULAR DEPENDENT X-RAY PHOTOELECTRON-SPECTRA [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (09) : 1519 - 1523

[1] Bellman R, 1966, NUMERICAL INVERSION, DOI DOI 10.2307/2004790

[2] Fadley C. S., 1976, Progress in Solid State Chemistry, V11, P265, DOI 10.1016/0079-6786(76)90013-3

[3] SURFACE ANALYSIS AND ANGULAR-DISTRIBUTIONS IN X-RAY PHOTOELECTRON-SPECTROSCOPY [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 4 (02) : 93 - 137

[4] FADLEY CS, 1985, PROGR SURFACE SCI

[5] SURFACE SENSITIVITY AND ANGULAR DEPENDENCE OF X-RAY PHOTOELECTRON SPECTRA [J]. SURFACE SCIENCE, 1973, 36 (02) : 661 - 674

[6] ULTRASOFT-X-RAY REFLECTION, REFRACTION, AND PRODUCTION OF PHOTOELECTRONS (100-1000-EV REGION) [J]. PHYSICAL REVIEW A, 1972, 6 (01): : 94 - &

[7] PROPERTIES OF OXIDIZED SILICON AS DETERMINED BY ANGULAR-DEPENDENT X-RAY PHOTOELECTRON-SPECTROSCOPY [J]. CHEMICAL PHYSICS LETTERS, 1976, 44 (02) : 225 - 231

[8] CHARACTERIZATION OF CONTAMINATION LAYERS BY EMISSION ANGLE DEPENDENT XPS WITH A DOUBLE-PASS CMA [J]. SURFACE AND INTERFACE ANALYSIS, 1984, 6 (02) : 75 - 77

[9] Hofmann S., 1982, J TRACE MICROPROBE T, V1, P213

[10] DETERMINATION OF DEPTH PROFILES BY ANGULAR DEPENDENT X-RAY PHOTOELECTRON-SPECTRA [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (09) : 1519 - 1523