CHARACTERIZATION OF CONTAMINATION LAYERS BY EMISSION ANGLE DEPENDENT XPS WITH A DOUBLE-PASS CMA

被引:27
作者
HOFMANN, S
SANZ, JM
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D O I
10.1002/sia.740060207
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:75 / 77
页数:3
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