RECOIL MIXING IN SOLIDS BY ENERGETIC ION-BEAMS

被引：268

作者：

LITTMARK, U ^{[1
]}

HOFER, WO ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS | 1980年 / 168卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(80)91274-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：329 / 342

页数：14

共 36 条

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[3] BAUERLEIN R, 1962, RAD DAMAGE SOLIDS, P358
[4] TRANSMISSION SPUTTERING AS A TECHNIQUE FOR MEASURING DISTRIBUTION OF ENERGY DEPOSITED IN SOLIDS BY ION-BOMBARDMENT
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ANDERSEN, HH
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[7] FEDDER S, UNPUBLISHED
[8] RECOIL IMPLANTATION FROM THIN SURFACE-FILMS ON SILICON
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[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (3-4): : 129 - 134
[9] ION-BEAM-INDUCED ATOMIC MIXING
HAFF, PK
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[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386
[10] EFFECTS OF ENHANCED DIFFUSION ON PREFERRED SPUTTERING OF HOMOGENEOUS ALLOY SURFACES
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