DEPTH RESOLUTION OF SPUTTER PROFILING

[1] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) : 2416 - 2422

[2] ANDERSEN HH, UNPUBLISHED

[3] ANDERSEN HH, 1974, PHYSICS IONIZED GASE, P361

[4] BORON-IMPLANTED PROFILES IN DIAMOND [J]. APPLIED PHYSICS LETTERS, 1976, 28 (01) : 7 - 8

[5] BUGER PA, 1977, Z NATURFORSCH A, V32, P144

[6] SPUTTERING IN SURFACE ANALYSIS OF SOLIDS - DISCUSSION OF SOME PROBLEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (05): : 1037 - 1044

[7] CATHODIC SPUTTERING FOR MICRO-DIFFUSION STUDIES [J]. JOURNAL OF APPLIED PHYSICS, 1952, 23 (02) : 181 - 183

[8] AUGER PROFILING OF ABRUPT LPE ALXGA1-XAS-GAAS HETEROJUNCTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (07) : 3147 - 3149

[9] GSCHNEIDNER KA, 1964, SOLID STATE PHYS, V16, P275

[10] ION-BEAM-INDUCED ATOMIC MIXING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386

[1] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) : 2416 - 2422

[2] ANDERSEN HH, UNPUBLISHED

[3] ANDERSEN HH, 1974, PHYSICS IONIZED GASE, P361

[4] BORON-IMPLANTED PROFILES IN DIAMOND [J]. APPLIED PHYSICS LETTERS, 1976, 28 (01) : 7 - 8

[5] BUGER PA, 1977, Z NATURFORSCH A, V32, P144

[6] SPUTTERING IN SURFACE ANALYSIS OF SOLIDS - DISCUSSION OF SOME PROBLEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (05): : 1037 - 1044

[7] CATHODIC SPUTTERING FOR MICRO-DIFFUSION STUDIES [J]. JOURNAL OF APPLIED PHYSICS, 1952, 23 (02) : 181 - 183

[8] AUGER PROFILING OF ABRUPT LPE ALXGA1-XAS-GAAS HETEROJUNCTIONS [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (07) : 3147 - 3149

[9] GSCHNEIDNER KA, 1964, SOLID STATE PHYS, V16, P275

[10] ION-BEAM-INDUCED ATOMIC MIXING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386