CATHODIC SPUTTERING FOR MICRO-DIFFUSION STUDIES

被引:22
作者
FISHER, TF
WEBER, CE
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10.1063/1.1702170
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O59 [应用物理学];
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页码:181 / 183
页数:3
相关论文
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  • [1] COBINE JD, 1941, GASEOUS CONDUCTORS T
  • [2] Guntherschulze A., 1926, Z PHYS, V36, P563, DOI [10.1007/BF01394303, DOI 10.1007/BF01394303]
  • [3] HIPPEL AV, 1936, ANN PHYSIK, V82, P1043
  • [4] The removal of thorium from the surface of a thoriated tungsten filament by positive ion bombardment
    Kingdon, KH
    Langmuir, I
    [J]. PHYSICAL REVIEW, 1923, 22 (02): : 148 - 160
  • [5] Loeb L. B., 1939, FUNDAMENTAL PROCESSE
  • [6] MCCUTCHEON DM, 1949, METAL PROGR, V56, P674
  • [7] STARR C, 1939, PHYS REV, V56, P216
  • [8] Theory of cathode sputtering in low voltage gaseous discharges
    Townes, CH
    [J]. PHYSICAL REVIEW, 1944, 65 (11/12): : 319 - 327