ION-BEAM-INDUCED ATOMIC MIXING

被引：129

作者：

HAFF, PK

SWITKOWSKI, ZE

机构：

[1] YALE UNIV,WRIGHT NUCL STRUCT LAB,NEW HAVEN,CT 06520

[2] CAL TECH,WK KELLOGG RADIAT LAB,PASADENA,CA 91125

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 08期

关键词：

D O I：

10.1063/1.324179

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3383 / 3386

页数：4

共 17 条

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[3]

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SHIMIZU, R ;

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[8] SURFACE-LAYER COMPOSITION CHANGES IN SPUTTERED ALLOYS AND COMPOUNDS [J].

LIAU, ZL ;

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POATE, JM .

APPLIED PHYSICS LETTERS, 1977, 30 (12) :626-628

[9] ION-BEAM SPUTTERING - EFFECT OF INCIDENT ION ENERGY ON ATOMIC MIXING IN SUBSURFACE LAYERS [J].

MCHUGH, JA .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1974, 21 (04) :209-215

[10]

POATE JM, 1976, NUCL INSTRUM METHODS, V132, P351

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