ION-BEAM SPUTTERING - EFFECT OF INCIDENT ION ENERGY ON ATOMIC MIXING IN SUBSURFACE LAYERS

[1] ALEKSEEV VI, 1967, SOVIET PHYS SOLID ST, V8, P2141

[2] ION MICROPROBE MASS ANALYZER [J]. SCIENCE, 1972, 175 (4024) : 853 - +

[3] SECONDARY ION MASS ANALYSIS - TECHNIQUE FOR 3-DIMENSIONAL CHARACTERIZATION [J]. ANALYTICAL CHEMISTRY, 1972, 44 (13) : A67 - &

[4] ANALYSIS OF THIN FILMS BY ION MICROPROBE MASS SPECTROMETRY [J]. ANALYTICAL CHEMISTRY, 1970, 42 (09) : 1060 - &

[5] FOGEL YM, 1972, INT J MASS SPECTROM, V9, P109, DOI DOI 10.1016/0020-7381(72)80037-8

[6] ION MICROPROBE MASS ANALYZER [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (13) : 5277 - &

[7] Lindhard J., 1963, MAT FYS MEDD K DAN V, V33, P31

[8] PAVLOV PV, 1967, FIZ TVERD TELA+, V8, P2141

[9] IMPURITY DISTRIBUTIONS IN ANODIC FILMS ON TANTALUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (01) : 24 - +

[10] Westmoreland J. E., 1970, Radiation Effects, V6, P187, DOI 10.1080/00337577008236296

[1] ALEKSEEV VI, 1967, SOVIET PHYS SOLID ST, V8, P2141

[2] ION MICROPROBE MASS ANALYZER [J]. SCIENCE, 1972, 175 (4024) : 853 - +

[3] SECONDARY ION MASS ANALYSIS - TECHNIQUE FOR 3-DIMENSIONAL CHARACTERIZATION [J]. ANALYTICAL CHEMISTRY, 1972, 44 (13) : A67 - &

[4] ANALYSIS OF THIN FILMS BY ION MICROPROBE MASS SPECTROMETRY [J]. ANALYTICAL CHEMISTRY, 1970, 42 (09) : 1060 - &

[5] FOGEL YM, 1972, INT J MASS SPECTROM, V9, P109, DOI DOI 10.1016/0020-7381(72)80037-8

[6] ION MICROPROBE MASS ANALYZER [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (13) : 5277 - &

[7] Lindhard J., 1963, MAT FYS MEDD K DAN V, V33, P31

[8] PAVLOV PV, 1967, FIZ TVERD TELA+, V8, P2141

[9] IMPURITY DISTRIBUTIONS IN ANODIC FILMS ON TANTALUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (01) : 24 - +

[10] Westmoreland J. E., 1970, Radiation Effects, V6, P187, DOI 10.1080/00337577008236296